Fabrication of carbon nanotube field-effect transistors in commercial silicon manufacturing facilities
Mindy D. Bishop, Gage Hills, Tathagata Srimani, Christian Lau, Denis Murphy, Samuel Fuller, Jefford Humes, Anthony Ratkovich, Mark Nelson & Max M. Shulaker
Nature Electronics volume 3, pages492–501(2020)Cite this article
Fabrication of carbon nanotube field-effect transistors in commercial
silicon manufacturing facilities
Mindy D. Bishop, Gage Hills, Tathagata Srimani, Christian Lau, Denis Murphy, Samuel Fuller, Jefford Humes, Anthony Ratkovich, Mark Nelson & Max M.
Shulaker
Nature Electronics volume 3, pages492–501(2020)Cite this article